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Bellow-sealed Oil-free Dry Scroll Vacuum Pump

VPSL series bellows-sealed scroll type dry scroll vacuum pump is a completely oil-free and clean vacuum pump, having a pumping speed of 12m3/h(7CFM), 16m3/h(9CFM), and 36m3/h(20CFM).

VPSL series bellows-sealed scroll-type dry scroll vacuum pump is a type of dry scroll vacuum pump, also known as oil free dry scroll vacuum pump or oilless dry scroll vacuum pump. It is a completely oil free and clean vacuum pump, having a pumping speed of 12m3/h(7CFM), 16m3/h(9CFM), and 36m3/h(20CFM). It adopts the world's most advanced bellows isolation structure to completely isolate the compression chamber and the bearing. It also uses fewer bearings to make the pump quieter and more reliable. At the same time, it can extract non-corrosive organic solvents and has a stronger water vapor processing capacity. The VPSL bellows-sealed scroll-type dry scroll vacuum pump is equipped with an independent controller, which makes the pump more intelligent, and can realize the operation of speed regulation, current limiting, and voltage stabilization of the pump according to the end user's process. Due to the scroll compression and tip seal structure, the pump is not suitable for pumping flammable, explosive, highly corrosive, and particle-containing applications. 

VPSL scroll vacuum pump structure

VPSL oil free scroll vacuum pump


Key Features:

Quiet Operation: The VPSL bellows-sealed scroll-type dry scroll vacuum pump is engineered to operate with low noise levels, ensuring a quiet working environment for operators and minimizing noise-related disturbances.


Oil-Free: The VPSL oil free scroll vacuum pump is completely oil-free, eliminating the need for oil changes and reducing maintenance requirements. This feature prevents the risk of oil contamination and eliminates oil vapor backstreaming, ensuring the purity and integrity of the vacuum system.


Bellows-Sealed Design: The VPSL bellows-sealed scroll-type dry scroll vacuum pump incorporates a bellows-sealed configuration, which prevents oil backflow and provides a clean and uncontaminated environment for various applications. This design is particularly beneficial for industries that require strict contamination control, such as semiconductor manufacturing or pharmaceutical production.


Intelligent Operation: The VPSL oil free scroll vacuum pump features intelligent controls and monitoring capabilities. It is equipped with advanced sensors and intelligent algorithms that enable real-time monitoring performance. The intelligent system optimizes pump operation, enhances efficiency, and enables proactive maintenance and troubleshooting.


High Efficiency: The VPSL oil free scroll vacuum pump utilizes scroll technology, which offers high pumping speeds for rapid evacuation of the vacuum chamber. This results in improved productivity, shorter process cycle times, and higher throughput for various applications.


Energy Efficient: The VPSL oil-less scroll vacuum pump is designed for energy efficiency, reducing overall power consumption and operational costs. It is equipped with energy-saving features, such as variable speed drives and optimized motor design, which contribute to lower energy consumption without compromising performance.


Compact and Space-Saving: The VPSL oil-less scroll vacuum pump has a compact design, allowing for easy integration into existing systems or installations with limited space. Its small footprint enables flexibility in equipment layout and ensures efficient utilization of available space.


Robust and Reliable: Built with high-quality materials and precision engineering, the VPSL oil-less scroll vacuum pump is known for its durability and reliability. It is designed to withstand demanding operating conditions and offers a long service life with minimal maintenance requirements.


Easy Maintenance: The VPSL oil free scroll vacuum pump's design facilitates easy maintenance and serviceability. It incorporates user-friendly features, such as accessible service points, removable panels, and clear visual indicators, to simplify routine maintenance tasks and minimize downtime.

Model VPSL10
VPSL15 VPSL36
Displacement m3/h 12.2 16 36
Ultimate Vacuum mbar 0.007 0.01 0.01
Motor power W 400 400 1200
Voltage input V 220-240 220-240 220-240
Noise level dB(A) 53 53 56
Inlet/Outlet flange -
KF25/KF25 KF25/KF25 KF40/KF25
Max water vapor capacity g/hr 136 268 270
Leak rate mbar∙l/s < 1x10-6
< 1x10-6 < 1x10-6
Dimension(LxWxH) mm 438x268x300 438x268x300 517x325x358
Weight
kgs 26 27 47
Cooling - Air-cooling
Air-cooling Air-cooling
Operating temperature
0~40
0~40 0~40


Mass spectrometry (GCMS, LCMS, ICPMS, vacuum leak detection, surface analysis, etc.) 

Electron microscope (electron accelerator, electron microscope) 

High-energy physics research (beamline, accelerator, microwave system, laser guidance) 

Industrial application (freeze dryer, Drying box, glove box, vacuum coating, vacuum degassing, vacuum packaging, vacuum perfusion, refrigerant perfusion, special gas circulation, SF6 recovery, voltage stabilization automation, etc.) 

Electronic semiconductors (backing pumps of molecular pumps, Silicon carbide growth furnace, vacuum exhaust station, plasma cleaning, special gas recovery, vacuum drying, etc.) 

Laboratory applications (vacuum experimental device, backing pumps of molecular pumps) 

Medical equipment (respiratory cancer detector, plasma sterilization, etc.), Aerospace research (space environment simulation, etc.) 

Bellow-sealed Oil-free Dry Scroll Vacuum Pump
VPSL series bellows-sealed scroll type dry scroll vacuum pump is a completely oil-free and clean vacuum pump, having a pumping speed of 12m3/h(7CFM), 16m3/h(9CFM), and 36m3/h(20CFM).
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