VPSL series bellows sealed dry scroll vacuum pump is a completely oil free and clean vacuum pump, with pumping speed of 12m3/h(7CFM), 16m3/h(9CFM), and 36m3/h(20CFM).
Clean. Quiet. Intelligent. Reliable.
The VPSL Series Bellows-Sealed Dry Scroll Vacuum Pump is a next-generation, completely oil-free vacuum solution designed for applications where cleanliness, low noise, and reliability matter most. Available pumping speeds of 12 m³/h (7 CFM), 16 m³/h (9 CFM), and 36 m³/h (20 CFM) make the VPSL series ideal for laboratories, analytical instruments, leak detection systems, and precision processes.

The VPSL pump operates without any lubricating oil, eliminating oil contamination and oil vapor backstreaming entirely. This ensures a clean, stable vacuum environment and reduces maintenance costs by removing the need for oil changes.
At the heart of the VPSL series is an advanced bellows-sealed isolation structure that fully separates the compression chamber from the bearing system. This innovative design enhances cleanliness, extends service life, and significantly improves operational reliability—making it an excellent choice for contamination-sensitive industries such as semiconductors, pharmaceuticals, and analytical laboratories.
Designed for comfort-sensitive environments, the VPSL dry scroll vacuum pump delivers exceptionally quiet operation at ≤ 53 dB with minimal vibration (< 3 mm/s). It integrates seamlessly into laboratories, cleanrooms, and indoor workspaces without disrupting daily operations.
The VPSL series is equipped with an independent intelligent controller that automatically adjusts pump speed based on process demand. Functions such as variable speed control, current limiting, and voltage stabilization ensure optimized performance, improved energy efficiency, and longer pump life.
Using proven scroll compression technology, the VPSL pump delivers fast evacuation and stable vacuum performance while consuming less energy. The result is higher productivity, shorter process times, and reduced operating costs.
With its compact footprint (438 × 268 × 300 mm), the VPSL oil-free dry scroll vacuum pump is easy to install in space-limited systems and fits seamlessly into both new and existing equipment layouts.
Manufactured with high-quality components and precision engineering, the VPSL series offers long service life and consistent performance. Its user-friendly design allows for quick maintenance and reduced downtime, ensuring maximum uptime for your operations.
| Model |
VPSL10 |
VPSL15 | VPSL36 | |
| Displacement | m3/h | 12.2 | 16 | 36 |
| Ultimate Vacuum | mbar | 0.007 | 0.01 | 0.01 |
| Motor power | W | 400 | 400 | 1200 |
| Voltage input | V | 220-240 | 220-240 | 220-240 |
| Noise level | dB(A) | 53 | 53 | 56 |
| Inlet/Outlet flange |
- |
KF25/KF25 | KF25/KF25 | KF40/KF25 |
| Max water vapor capacity | g/hr | 136 | 268 | 270 |
| Leak rate | mbar∙l/s |
< 1x10-6 |
< 1x10-6 | < 1x10-6 |
| Dimension(LxWxH) | mm | 438x268x300 | 438x268x300 | 517x325x358 |
|
Weight |
kgs | 26 | 27 | 47 |
| Cooling | - |
Air-cooling |
Air-cooling | Air-cooling |
| Operating temperature |
℃ |
0~40 |
0~40 | 0~40 |

Mass spectrometry (GCMS, LCMS, ICPMS, vacuum leak detection, surface analysis, etc.)
Electron microscope (electron accelerator, electron microscope)
High-energy physics research (beamline, accelerator, microwave system, laser guidance)
Industrial application (freeze dryer, Drying box, glove box, vacuum coating, vacuum degassing, vacuum packaging, vacuum perfusion, refrigerant perfusion, special gas circulation, SF6 recovery, voltage stabilization automation, etc.)
Electronic semiconductors (backing pumps of molecular pumps, Silicon carbide growth furnace, vacuum exhaust station, plasma cleaning, special gas recovery, vacuum drying, etc.)
Laboratory applications (vacuum experimental device, backing pumps of molecular pumps)
Medical equipment (respiratory cancer detector, plasma sterilization, etc.), Aerospace research (space environment simulation, etc.)

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