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Bellows-sealed Oil-free Dry Scroll Vacuum Pump

VPSL series bellows sealed dry scroll vacuum pump is a completely oil free and clean vacuum pump, with pumping speed of 12m3/h(7CFM), 16m3/h(9CFM), and 36m3/h(20CFM).

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VPSL Series Bellows-Sealed Oil-Free Dry Scroll Vacuum Pump


Clean. Quiet. Intelligent. Reliable.


The VPSL Series Bellows-Sealed Dry Scroll Vacuum Pump is a next-generation, completely oil-free vacuum solution designed for applications where cleanliness, low noise, and reliability matter most. Available pumping speeds of 12 m³/h (7 CFM), 16 m³/h (9 CFM), and 36 m³/h (20 CFM) make the VPSL series ideal for laboratories, analytical instruments, leak detection systems, and precision processes.


bellows sealed dry scroll vacuum pump structure

100% Oil-Free, 100% Clean

The VPSL pump operates without any lubricating oil, eliminating oil contamination and oil vapor backstreaming entirely. This ensures a clean, stable vacuum environment and reduces maintenance costs by removing the need for oil changes.


Advanced Bellows-Sealed Technology

At the heart of the VPSL series is an advanced bellows-sealed isolation structure that fully separates the compression chamber from the bearing system. This innovative design enhances cleanliness, extends service life, and significantly improves operational reliability—making it an excellent choice for contamination-sensitive industries such as semiconductors, pharmaceuticals, and analytical laboratories.


Ultra-Quiet and Low Vibration

Designed for comfort-sensitive environments, the VPSL dry scroll vacuum pump delivers exceptionally quiet operation at ≤ 53 dB with minimal vibration (< 3 mm/s). It integrates seamlessly into laboratories, cleanrooms, and indoor workspaces without disrupting daily operations.


Intelligent Control, Smarter Operation

The VPSL series is equipped with an independent intelligent controller that automatically adjusts pump speed based on process demand. Functions such as variable speed control, current limiting, and voltage stabilization ensure optimized performance, improved energy efficiency, and longer pump life.


High Performance with Lower Energy Consumption

Using proven scroll compression technology, the VPSL pump delivers fast evacuation and stable vacuum performance while consuming less energy. The result is higher productivity, shorter process times, and reduced operating costs.


Compact Design, Easy Integration

With its compact footprint (438 × 268 × 300 mm), the VPSL oil-free dry scroll vacuum pump is easy to install in space-limited systems and fits seamlessly into both new and existing equipment layouts.


Built for Reliability and Easy Maintenance

Manufactured with high-quality components and precision engineering, the VPSL series offers long service life and consistent performance. Its user-friendly design allows for quick maintenance and reduced downtime, ensuring maximum uptime for your operations.

ModelVPSL10
VPSL15VPSL36
Displacementm3/h12.21636
Ultimate Vacuummbar0.0070.010.01
Motor powerW4004001200
Voltage inputV220-240220-240220-240
Noise leveldB(A)535356
Inlet/Outlet flange-
KF25/KF25KF25/KF25KF40/KF25
Max water vapor capacityg/hr136268270
Leak ratembar∙l/s< 1x10-6
< 1x10-6< 1x10-6
Dimension(LxWxH)mm438x268x300438x268x300517x325x358
Weight
kgs262747
Cooling-Air-cooling
Air-coolingAir-cooling
Operating temperature℃
0~40
0~400~40


Mass spectrometry (GCMS, LCMS, ICPMS, vacuum leak detection, surface analysis, etc.) 

Electron microscope (electron accelerator, electron microscope) 

High-energy physics research (beamline, accelerator, microwave system, laser guidance) 

Industrial application (freeze dryer, Drying box, glove box, vacuum coating, vacuum degassing, vacuum packaging, vacuum perfusion, refrigerant perfusion, special gas circulation, SF6 recovery, voltage stabilization automation, etc.) 

Electronic semiconductors (backing pumps of molecular pumps, Silicon carbide growth furnace, vacuum exhaust station, plasma cleaning, special gas recovery, vacuum drying, etc.) 

Laboratory applications (vacuum experimental device, backing pumps of molecular pumps) 

Medical equipment (respiratory cancer detector, plasma sterilization, etc.), Aerospace research (space environment simulation, etc.) 

  1.  What Are the Differences Between Dry Scroll Vacuum Pumps and Oil-Sealed Rotary Vane Vacuum Pumps?
    The key advantages of dry scroll vacuum pumps are their oil-free operation, clean vacuum environment, low noise levels, and relatively simple maintenance. In contrast, oil-sealed rotary vane vacuum pumps offer mature and proven technology, lower purchase costs, and excellent ultimate vacuum performance.

  2. How often does the equipment need maintenance, and what are the wear parts?
    Two years or 8000 working hours. 
    The tip seal and bearings

  3. What is the warranty period?
    One year
Bellows-sealed Oil-free Dry Scroll Vacuum Pump
VPSL series bellows sealed dry scroll vacuum pump is a completely oil free and clean vacuum pump, with pumping speed of 12m3/h(7CFM), 16m3/h(9CFM), and 36m3/h(20CFM).
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