The impeller of the FB3600 turbomolecular vacuum pump uses a variable section leaf tooth, which enhances blade strength and reduces rotor weight, shortens run-up time, reduces mechanical losses, and increased service life.
The impeller of the FB3600 turbomolecular vacuum pump uses a variable section leaf tooth, which enhances blade strength and reduces rotor weight, shortens run-up time, reduces mechanical losses, and increased service life.
Model | FB3600Z | ||
Inlet Flange | - | 400 ISO-K | |
Outlet Flange | - | 100 ISO-K | |
Pumping Speed | L/s | 3600 | |
Compression Ratio N2/H2 | - | 1×108/5×102 | |
Ultimate Pressure | Pa | 2×10-6 | |
Rotation Speed | rpm | 12600 | |
Run-up Time | min | 10 | |
Vibration | μm | ≤ 0.15 | |
Backing Pump Speed | L/s | 30-70 | |
Cooling Water Temperature | ℃ | ≤ 20(Ambient temperature<37℃) | |
Pump Temperature | ℃ | ≤ 80 | |
Cooling Water Flow | L/min | 1 | |
Installation Direction | - | Any | |
Weight | kg | ~ 100 |