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Turbomolecular Vacuum Pump

The impeller of the FB3600 turbomolecular vacuum pump uses a variable section leaf tooth, which enhances blade strength and reduces rotor weight, shortens run-up time, reduces mechanical losses, and increased service life.

The impeller of the FB3600 turbomolecular vacuum pump uses a variable section leaf tooth, which enhances blade strength and reduces rotor weight, shortens run-up time, reduces mechanical losses, and increased service life.

ModelFB3600Z
Inlet Flange-400 ISO-K
Outlet Flange-100 ISO-K
Pumping SpeedL/s3600
Compression Ratio N2/H2-1×108/5×102
Ultimate PressurePa2×10-6
Rotation Speedrpm12600
Run-up Timemin10
Vibrationμm≤ 0.15
Backing Pump Speed L/s30-70
Cooling Water Temperature≤ 20(Ambient temperature<37℃)
Pump Temperature≤ 80
Cooling Water FlowL/min1
Installation Direction-

Any

Weightkg~ 100


Turbomolecular Vacuum Pump
The impeller of the FB3600 turbomolecular vacuum pump uses a variable section leaf tooth, which enhances blade strength and reduces rotor weight, shortens run-up time, reduces mechanical losses, and increased service life.
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