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Turbomolecular Vacuum Pump
The impeller of the FB3600 turbomolecular vacuum pump uses a variable section leaf tooth, which enhances blade strength and reduces rotor weight, shortens run-up time, reduces mechanical losses, and increased service life.
The impeller of the FB3600 turbomolecular vacuum pump uses a variable section leaf tooth, which enhances blade strength and reduces rotor weight, shortens run-up time, reduces mechanical losses, and increased service life.
| Model | FB3600Z | ||
| Inlet Flange | - | 400 ISO-K | |
| Outlet Flange | - | 100 ISO-K | |
| Pumping Speed | L/s | 3600 | |
| Compression Ratio N2/H2 | - | 1×108/5×102 | |
| Ultimate Pressure | Pa | 2×10-6 | |
| Rotation Speed | rpm | 12600 | |
| Run-up Time | min | 10 | |
| Vibration | μm | ≤ 0.15 | |
| Backing Pump Speed | L/s | 30-70 | |
| Cooling Water Temperature | ℃ | ≤ 20（Ambient temperature<37℃） | |
| Pump Temperature | ℃ | ≤ 80 | |
| Cooling Water Flow | L/min | 1 | |
| Installation Direction | - | Any | |
| Weight | kg | ～ 100 | |
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