Hybrid Molecular Vacuum Pump

The hybrid molecular pump has no selectivity and no memory effect on the pumped gas. Because of the high compression ratio of the gas with large molecules, the pump can obtain a clean high vacuum without the need for a cold trap. and oil trap.

The FB series hybrid molecular pump is a kind of mechanical vacuum pump that is obtained by a high-speed rotating rotor carrying gas molecules to obtain an ultra-high vacuum. It is a combination of a turbo molecular pump and a disc-type traction pump, which simultaneously has a large pumping speed and compression ratio for the turbomolecular pump when it has molecular flow; as well as a high pumping speed and compression ratio for the traction pump when it with high pressure. Due to these characteristics, the application range of molecular pumps has been expanded.

Model		FB600(F)		FB1200(F)		FB1600(F)
Inlet Flange	-	160 ISO-K	150 CF	200 ISO-K	200 CF	250 ISO-K	250 CF
Outlet Flange	-	KF40		KF40		KF40
Pumping Speed	L/s	600		1200		1600
Compression Ratio N₂/H₂	-	1×10⁹/8×10³ (1×10⁹/1×10⁴)		1×10⁹/1×10⁴		1×10⁹/1×10⁴
Ultimate Pressure	Pa	5×10^-7	8×10^-8	5×10^-7	8×10^-8	5×10^-7	8×10^-8
Rotation Speed	rpm	27000		27000		27000
Run-up Time	min	4.5		5		6
Vibration	μm	≤ 0.1		≤ 0.1		≤ 0.15
Backing Pump Speed	L/s	4-8		8-15		15
Cooling Water Temperature	℃	≤ 20（Ambient temperature<37℃）		≤ 20（Ambient temperature<37℃）		≤ 20（Ambient temperature<37℃）
Pump Temperature	℃	≤ 120		≤ 120		≤ 120
Cooling Water Flow	L/min	2		2		2
Heater Power	W	＜ 250		＜ 300		＜ 350
Heater Voltage	V	AC220		AC220		AC220
Installation Direction	-	Vertical±5°		Vertical±5°		Vertical±5°
Weight	kg	～ 25		～ 29		～ 31

photovoltaic, lighting, aerospace, semiconductor, energy, military, laser, home appliances, materials, automotive, and scientific research.

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