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Hybrid Molecular Vacuum Pump

The hybrid molecular pump has no selectivity and no memory effect on the pumped gas. Because of the high compression ratio of the gas with large molecules, the pump can obtain a clean high vacuum without the need for a cold trap. and oil trap.

The FB Hybrid Molecular Pump is an advanced vacuum pump designed to deliver efficient high vacuum performance while maintaining a relatively high pumping speed. This pump is particularly useful in applications where both a high vacuum level and reasonable gas throughput are required. Below is a detailed description of the FB Hybrid Molecular Pump with pumping speeds of 600, 1200, and 1600 liters per second (l/s):


FB Hybrid Molecular Pump 

Key Features:

Hybrid Pumping Technology: The FB Hybrid Molecular Pump combines the benefits of both turbomolecular and drag pumping technologies. Turbomolecular stages provide high-speed rotation for efficient gas evacuation, while the drag stages minimize friction and wear.


Pumping Speed Options: This pump is available in multiple pumping speed options, including 600 l/s, 1200 l/s, and 1600 l/s. Users can choose the appropriate model based on their specific vacuum system requirements.


High Vacuum Performance: The hybrid design of the FB pump allows it to achieve and maintain high vacuum levels, making it suitable for applications that demand precise pressure control and low gas contamination. It is commonly used in scientific research, semiconductor manufacturing, and analytical instrumentation.


Compact Design: The FB Hybrid Molecular Pump features a compact and space-saving design, making it ideal for integration into vacuum systems with limited available space.


Precision Engineering: This pump incorporates precision-engineered components, including high-speed rotor blades and advanced pumping stages designed to efficiently capture and remove gas molecules from the vacuum chamber.


Low Noise and Vibration: Despite its high pumping capacity, the FB pump is designed for quiet and low-vibration operation, minimizing disturbances in laboratory and industrial environments.


Versatile Applications: The FB Hybrid Molecular Pump is versatile and suitable for a wide range of applications, including mass spectrometry, surface analysis, electron microscopy, and vacuum deposition.


Safety and Monitoring: Depending on the specific model, the pump may include safety features such as overtemperature protection and rotational speed monitoring, enhancing operational safety and reliability.


Compatibility: The FB Hybrid Molecular Pump is designed for seamless integration into vacuum systems and is often used alongside other vacuum components, such as backing pumps and vacuum gauges, to create comprehensive vacuum solutions.


Reliability and Durability: This pump is constructed for long-lasting reliability and durability, capable of continuous operation even in demanding industrial and research environments.


The FB Hybrid Molecular Pump is an excellent choice for applications that require both high vacuum performance and moderate gas throughput. Its hybrid design offers the advantages of both turbomolecular and magnetic bearing technologies, making it a valuable tool for achieving and maintaining specific vacuum levels in various scientific and industrial settings.



ModelFB600(F)FB1200(F)FB1600(F)
Inlet Flange-160 ISO-K150 CF200 ISO-K200 CF
250 ISO-K250 CF
Outlet Flange-KF40
KF40
KF40
Pumping SpeedL/s600
1200
1600
Compression Ratio N2/H2-1×109/8×103 (1×109/1×104)1×109/1×1041×109/1×104
Ultimate PressurePa5×10-78×10-85×10-78×10-85×10-78×10-8
Rotation Speedrpm27000
2700027000
Run-up Timemin4.5
5
6
Vibrationμm≤ 0.1≤ 0.1≤ 0.15
Backing Pump Speed L/s4-8
8-1515
Cooling Water Temperature≤ 20(Ambient temperature<37℃)≤ 20(Ambient temperature<37℃)≤ 20(Ambient temperature<37℃)
Pump Temperature≤ 120≤ 120≤ 120
Cooling Water FlowL/min2
2
2
Heater PowerW< 250
< 300< 350
Heater VoltageVAC220AC220
AC220
Installation Direction-Vertical±5°Vertical±5°Vertical±5°
Weightkg~ 25~ 29~ 31


photovoltaic, lighting, aerospace, semiconductor, energy, military, laser, home appliances, materials, automotive, and scientific research.


Hybrid Molecular Vacuum Pump
The hybrid molecular pump has no selectivity and no memory effect on the pumped gas. Because of the high compression ratio of the gas with large molecules, the pump can obtain a clean high vacuum without the need for a cold trap. and oil trap.
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