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Grease-Lubricated Molecular Vacuum Pump

The FB-Z series grease-lubricated molecular pump adopts the first variable-section leaf tooth in China. The bearing adopts a grease-lubricated ceramic precision bearing, which realizes the installation of the pump at any angle and cleans the oil-free high vacuum environment with higher reliability.

The FB-Z series grease-lubricated molecular pump adopts the first variable-section leaf tooth in China. The bearing adopts a grease-lubricated ceramic precision bearing, which realizes the installation of the pump at any angle and clean oil-free high vacuum environment with higher reliability. Because of the high compression ratio of the gas with large molecules, the pump can obtain a clean high vacuum without the need for a cold trap. and oil trap. Grease-lubricated ceramic precision bearing for installation at any angle of the pump. 

ModelFB300Z(F)FB650Z(F)FB1300Z(F)
FB2000Z(F)
Inlet Flange-100 ISO-K100 CF1600 ISO-K150 CF
200 ISO-K200 CF250 ISO-K250 CF
Outlet Flange-KF25
KF40
KF40
KF50
Pumping SpeedL/s300
650
1300
2000
Compression Ratio N2/H2-1×108/1×1031×109/1×1041×109/1×1041×109/1×104
Ultimate PressurePa5×10-78×10-85×10-78×10-85×10-78×10-85×10-78×10-8
Rotation Speedrpm33000
240002400024000
Run-up Timemin3.5
5
55
Vibrationμm≤ 0.1≤ 0.1≤ 0.1≤ 0.1
Backing Pump Speed L/s24-88-15
8-15
Cooling Water Temperature≤ 20(Ambient temperature<37℃)≤ 20(Ambient temperature<37℃)≤ 20(Ambient temperature<37℃)≤ 20(Ambient temperature<37℃)
Pump Temperature≤ 80≤ 80≤ 80≤ 80
Cooling Water FlowL/min1111
Installation Direction-

Any

Any

AnyAny
Weightkg~ 11~ 26~ 27~ 31


photovoltaic, lighting, aerospace, semiconductor, energy, military, laser, home appliances, materials, automotive, and scientific research.

Grease-Lubricated Molecular Vacuum Pump
The FB-Z series grease-lubricated molecular pump adopts the first variable-section leaf tooth in China. The bearing adopts a grease-lubricated ceramic precision bearing, which realizes the installation of the pump at any angle and cleans the oil-free high vacuum environment with higher reliability.
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