The FB-Z series grease-lubricated molecular pump adopts the first variable-section leaf tooth in China. The bearing adopts a grease-lubricated ceramic precision bearing, which realizes the installation of the pump at any angle and cleans the oil-free high vacuum environment with higher reliability.
The FB-Z series grease-lubricated molecular pump adopts the first variable-section leaf tooth in China. The bearing adopts a grease-lubricated ceramic precision bearing, which realizes the installation of the pump at any angle and clean oil-free high vacuum environment with higher reliability. Because of the high compression ratio of the gas with large molecules, the pump can obtain a clean high vacuum without the need for a cold trap. and oil trap. Grease-lubricated ceramic precision bearing for installation at any angle of the pump.
Model | FB300Z(F) | FB650Z(F) | FB1300Z(F) | FB2000Z(F) | |||||
Inlet Flange | - | 100 ISO-K | 100 CF | 1600 ISO-K | 150 CF | 200 ISO-K | 200 CF | 250 ISO-K | 250 CF |
Outlet Flange | - | KF25 | KF40 | KF40 | KF50 | ||||
Pumping Speed | L/s | 300 | 650 | 1300 | 2000 | ||||
Compression Ratio N2/H2 | - | 1×108/1×103 | 1×109/1×104 | 1×109/1×104 | 1×109/1×104 | ||||
Ultimate Pressure | Pa | 5×10-7 | 8×10-8 | 5×10-7 | 8×10-8 | 5×10-7 | 8×10-8 | 5×10-7 | 8×10-8 |
Rotation Speed | rpm | 33000 | 24000 | 24000 | 24000 | ||||
Run-up Time | min | 3.5 | 5 | 5 | 5 | ||||
Vibration | μm | ≤ 0.1 | ≤ 0.1 | ≤ 0.1 | ≤ 0.1 | ||||
Backing Pump Speed | L/s | 2 | 4-8 | 8-15 | 8-15 | ||||
Cooling Water Temperature | ℃ | ≤ 20(Ambient temperature<37℃) | ≤ 20(Ambient temperature<37℃) | ≤ 20(Ambient temperature<37℃) | ≤ 20(Ambient temperature<37℃) | ||||
Pump Temperature | ℃ | ≤ 80 | ≤ 80 | ≤ 80 | ≤ 80 | ||||
Cooling Water Flow | L/min | 1 | 1 | 1 | 1 | ||||
Installation Direction | - | Any | Any | Any | Any | ||||
Weight | kg | ~ 11 | ~ 26 | ~ 27 | ~ 31 |
photovoltaic, lighting, aerospace, semiconductor, energy, military, laser, home appliances, materials, automotive, and scientific research.