Grease-Lubricated Molecular Vacuum Pump

The FB-Z series grease-lubricated molecular pump adopts the first variable-section leaf tooth in China. The bearing adopts a grease-lubricated ceramic precision bearing, which realizes the installation of the pump at any angle and clean oil-free high vacuum environment with higher reliability. Because of the high compression ratio of the gas with large molecules, the pump can obtain a clean high vacuum without the need for a cold trap. and oil trap. Grease-lubricated ceramic precision bearing for installation at any angle of the pump.

Model		FB300Z(F)		FB650Z(F)		FB1300Z(F)		FB2000Z(F)
Inlet Flange	-	100 ISO-K	100 CF	1600 ISO-K	150 CF	200 ISO-K	200 CF	250 ISO-K	250 CF
Outlet Flange	-	KF25		KF40		KF40		KF50
Pumping Speed	L/s	300		650		1300		2000
Compression Ratio N2/H2	-	1×10⁸/1×103		1×109/1×104		1×109/1×104		1×109/1×104
Ultimate Pressure	Pa	5×10-7	8×10-8	5×10-7	8×10-8	5×10-7	8×10-8	5×10-7	8×10-8
Rotation Speed	rpm	33000		24000		24000		24000
Run-up Time	min	3.5		5		5		5
Vibration	μm	≤ 0.1		≤ 0.1		≤ 0.1		≤ 0.1
Backing Pump Speed	L/s	2		4-8		8-15		8-15
Cooling Water Temperature	℃	≤ 20（Ambient temperature<37℃）		≤ 20（Ambient temperature<37℃）		≤ 20（Ambient temperature<37℃）		≤ 20（Ambient temperature<37℃）
Pump Temperature	℃	≤ 80		≤ 80		≤ 80		≤ 80
Cooling Water Flow	L/min	1		1		1		1
Installation Direction	-	Any		Any		Any		Any
Weight	kg	～ 11		～ 26		～ 27		～ 31

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